Onto Innovation Receives Volume Purchase Agreement from DRAM Manufacturer for Metrology Product Suite

Onto Innovation Inc. announced that a leading DRAM manufacturer has finalized a $69 million volume purchase agreement spanning the company’s optical metrology ecosystem, including common films, optical critical dimension, and integrated metrology.

This agreement implies increased adoption of the Iris system for common films metrology, along with increased adoption of integrated metrology. Deliveries begin in the 1st quarter of 2025, supporting management’s expectations for the start of a recovery in the DRAM market in 2025.

Beyond memory, the demand for the firm’s films metrology has been robust, nearly doubling in revenue year over year. In response to market feedback, the company is pleased to announce the launch of the Iris G2 system, a single platform film metrology system for both common and critical films for advanced node, mature and specialty device applications.

The Iris G2 system features deep ultraviolet (DUV) spectroscopic ellipsometry (SE) for common films and coupled proprietary laser ellipsometry technologies for critical films. This single platform is expected to serve all common and critical films applications, providing customers with the flexibility to optimize cost of ownership and performance based on their needs. Additionally, a single platform simplifies fleet management and fab operations while reducing overall capital investment.

“The Iris G2 system offers a flexible, compelling cost of ownership metrology solution for ultra-thin multilayer films measuring 10Å to 50Å,” says Zhuan Liu, VP, optical metrology suite, Onto. “We believe our proprietary technology will achieve better stability and higher throughput compared to alternative technologies.”

The Iris G2 system will address the critical films market, forecast to be approximately $400 million in 2025, according to TechInsights and management estimates, with the 1st shipment scheduled for the 1st quarter of 2025.