KLA Assigned Patent

KLA Corporation, Milpitas, CA, has been assigned a patent (11783470) developed by Huang, Junqing, Fremont, CA, Lee, Hucheng, Cupertino, CA, Park, Sangbong, Dublin, CA, and Li, Xiaochun, San Jose, CA, for a “design-assisted inspection for DRAM and 3D NAND devices.“

The abstract of the patent published by the U.S. Patent and Trademark Office states: “With the disclosed systems and methods for DRAM and 3D NAND inspection, an image of the wafer is received based on the output for an inspection tool. Geometric measurements of a design of a plurality of memory devices on the wafer are received. A care area with higher inspection sensitivity is determined based on the geometric measurements.”

The patent application was filed on 2022-04-18 (17/722710).