R&D: SEM Grain Characterization of Metals for Nanoelectronics

Microscopy and Microanalysis has published an article written by Matthew R Hauwiller, Charlie Mann, Peter Mach, Karen Terry, and Mike Kautzky, Seagate Technology, Bloomington, MN, USA.

Abstract: “Modern electronics are composed of nanoscale structures with tight material and geometric specifications. Producing these nanoelectronics in large volume requires high throughput and minimal sample damage for both production and research. For mass capacity data storage, new technologies such as Heat Assisted Magnetic Recording (HAMR) incorporate magnetics and plasmonics in complex configurations that require control of geometry, nanostructure, and elemental composition [1].“