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HeFeChip Assigned Two Patents

Fabricating magnetic memory, asymmetric engineered storage layer of magnetic tunnel junction element for magnetic memory device

Fabricating magnetic memory
HeFeChip Corporation Limited, Sai Ying Pun, Hong Kong, has been assigned a patent (11545617) developed by Chern, Geeng-Chuan, Cupertino, CA, for a “method of fabricating magnetic memory device.”

The abstract of the patent published by the U.S. Patent and Trademark Office states: “A method for forming a magnetic memory device is disclosed. At least one magnetic tunneling junction (MTJ) stack is formed on the substrate. The MTJ stack comprises a reference layer, a tunnel barrier layer and a free layer. A top electrode layer is formed on the MTJ stack. A patterned sacrificial layer is formed on the top electrode layer. The MTJ stack is then subjected to a MTJ patterning process in a high-density plasma chemical vapor deposition (HDPCVD) chamber, thereby sputtering off the MTJ stack not covered by the patterned sacrificial layer. During the MTJ patterning process, sidewalls of layers or sub-layers of the MTJ stack are simultaneously passivated in the HDPCVD chamber by depositing a sidewall protection layer.

The patent application was filed on 2021-09-30 (17/489822).

Asymmetric engineered storage layer of magnetic tunnel junction element for magnetic memory device
HeFeChip Corporation Limited, Sai Ying Pun, Hong Kong, has been assigned a patent (11538986) developed by Ma, Qinli, Mt Kisco, NY, Chen, Wei-Chuan, Scarsdale, NY, and Han, Shu-Jen, Armonk, NY for anasymmetric engineered storage layer of magnetic tunnel junction element for magnetic memory device.”

The abstract of the patent published by the U.S. Patent and Trademark Office states: “A storage layer of a magnetic tunnel junction (MTJ) element is disclosed. The storage layer having perpendicular magnetic anisotropy includes a first ferromagnetic layer, a first dust layer disposed directly on the first ferromagnetic layer, a second ferromagnetic layer disposed directly on the first dust layer, a second dust layer disposed directly on the second ferromagnetic layer, and a third ferromagnetic layer disposed directly on the second dust layer. A material of the first dust layer is different from a material of the second dust layer.

The patent application was filed on 2020-04-15 (16/848846).

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