KLA Assigned Patent
Design-assisted inspection for DRAM and 3D NAND
By Francis Pelletier | May 3, 2022 at 2:00 pmKLA Corp., Milpitas, CA, has been assigned a patent (11,308,606) developed by Huang, Junqing, Fremont, CA, Lee, Hucheng, Cupertino, CA, Park, Sangbong, Dublin, CA, and Li, Xiaochun, San Jose, CA, for a “design-assisted inspection for DRAM and 3D NAND devices.“
The abstract of the patent published by the U.S. Patent and Trademark Office states: “With the disclosed systems and methods for DRAM and 3D NAND inspection, an image of the wafer is received based on the output for an inspection tool. Geometric measurements of a design of a plurality of memory devices on the wafer are received. A care area with higher inspection sensitivity is determined based on the geometric measurements.”
The patent application was filed on August 16, 2019 (16/542,376).
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