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ASM IP Holding Assigned Patent

Synthesis and use of precursors for ALD of group VA element containing thin films

ASM IP Holding B.V., Almere, The Netherlands, has been assigned a patent (10,941,487) developed by Pore, Viljami, Helsinki, Finland, Hatanpaa, Timo, Ritala, Mikko, and Leskela, Markku, Espoo, Finland, for "synthesis and use of precursors for ALD of g...

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