R&D: Latest Advances in Monolithic 3D Integrated Flash Memories

Uprising nano memories: Latest advances
in monolithic three dimensional (3D) integrated Flash memories
By Mojtaba Joodaki

Abstract: Flash memory industry has showed remarkable steady progress during the last few years. This achievement is owed to the development of the 3D NAND Flash structures. This paper reviews the latest advances in the monolithic 3D integration of the NAND Flash memory. It highlights key technical challenges and uses important aspects and characteristics of various designs in order to illustrate mechanisms that overcome the technical barriers. Furthermore, the most promising solutions are marked by comparing advantages and disadvantages of different designs. Finally, future prospects and expected market demand of NAND Flash memory are addressed.

3D NAND integration technology employing singe-crystal nanowire transistors