Axcelis Ships Purion XE Follow On Order to Unknown Asian Chipmaker

Axcelis Technologies, Inc., supplier of enabling ion implantation solutions for the semiconductor industry, has shipped a follow on order for the Purion XE high energy implanter to a major chipmaker in the AsiaPac region.

The system will be used to support volume production of advanced NAND flash devices. The system shipped in the first quarter.

John Aldeborgh, EVP, customer operations, Axcelis, said: “We are very excited about the opportunity to support our customer’s need for additional manufacturing capacity as well as help them achieve their advanced NAND roadmap goals. The global cloud storage market is expected to grow by a CAGR of over 25% by 2020, which is driving significant expansion in the NAND market. Our leadership in high energy and our technological expertise in this space will provide us with a strong opportunity for market share expansion.”

The Purion Platform
The Purion platform redefines the ion implanter application space, delivering purity, recision and productivity to enhance customers’ device performance and yield. On this platform, Axcelis has built a complete implant product solution designed for advanced planar and 3D devices while providing flexible and productive manufacturing capability. This cross-product platform architecture is designed to drive manufacturing flexibility and lower the total cost of fab operations. All Purion implanters incorporate Axcelis’ Purion Contamination Shield Defense System, for implant quality, so even the most sensitive devices can realize optimized device performance. The platform’s proprietary Purion Vector dose and angle control system, and constant focal length scanning deliver a precise and repeatable dopant placement. The platform’s beam current performance combined with the Purion 500wph end station provides high productivity. It includes the Purion M medium current implanter, the Purion H high current implanter, and the Purion XE high energy implanter.