NX-PTR Atomic Force Microscopy From Park Systems

Park Systems, Inc., manufacturer of atomic force microscopy (AFM) products, introduces its next generation NX-PTR, an automated system for HDD drive slider manufacturing.

Developed in collaboration with HDD makers, NX-PTR increases production yield by 200% with an enhanced automation routine, faster scan rate and recipe automation.

“Park Systems trademark AFM line demonstrates the accuracy and reliability in innovation required by the explosive nanotechnology companies as they shape the future for nanoscale products at the production level,” stated Ryan Yoo, VP of global sales and marketing. “Park’s latest AFM system surpasses all other previous systems available for extremely accurate pole tip recession (PTR) measurements with sub-Angstrom gauge repeatability and reproducibility enhancing HDD production with dramatic improvements in automated measurements at the sub angstrom level.”

The HDD industry uses AFM for PTR measurements, a critical process for monitoring HDD drive failures. Park developed the PTR Series, an automated AFM with sub-Angstrom accuracy and repeatabilityfor PTR measurements for HDD sliders and now announces the next generation design, for cost reduction in the manufacturing process.

NX-PTR sets a new standard in precision AFM nanometrology imaging for inline HDD slider metrology that provides fast, streamlined PTR measurements from automatic tip exchange to large area feature measurements to the automatic zoom-in imaging of reader/writer poles. It generates accurate images of highly detailed regions of interest within larger macrostructures, without any need of reference scan to correct various scanner artifacts.

The NX-PTR offers accurate PTR measurements with sub-Angstrom gauge repeatability and reproducibility. The automated measurements are available on various levels of individual sliders, row bars, and/or carrier. It provides accuracy in topography height measurement by utilizing its ultra-low noise Z detector instead of the commonly used Z voltage signal that is non-linear in nature. Industry-leading low noise Z detector replace the applied Z voltage as the topography signal.

With enhanced electronic and mechanics design, NX-PTR identifying feature is the Park patented crosstalk eliminated scan system of AFM which allows for flat scans, eliminating the multi-scan process. HDD production level sample topography is measured by industry leading low noise Z detector. It provides accurate surface height recording, without piezo creep, even during high-speed scanning.

“While most AFMs generate impressive three-dimensional images, many are not designed for advanced metrology. They function well as a qualitative imaging tool, but lack the accuracy required to monitor critical process parameters for manufacturing control. Proper monitoring of the PTR value requires a measurement accuracy of 0.1nm, referenced against a surface which is 20µm away. This is equivalent to repeatedly measuring 1mm step heights from 20m away, down to the accuracy of a human hair (about 0.1mm),” explains Dr. Sang-il Park, CEO and founder.

“Due to the design of traditional AFMs, they display intrinsic bowing in the range of 50nm over the 20µm scan. This can be corrected for by subtracting a best-fit second- or third-order plane, but this makes the measurement of PTR (typically around 1nm) more of an art than a science for most instruments. Park NX-PTR is designed and optimized for inline slider metrology, providing a highly orthogonal and flat scan with adequate repeatability and accuracy for precision nanometrology. Also, in True Non-Contactmode, tip-sample interaction is very weak, which minimizes wear on both the tip and the sample during scanning.”

The NX-PTR system is designed to be mechanically and thermally stable, minimizing thermal drift, providing high degree of accuracy and precision in the measurements and nanoscale levels. In addition, the Park AFM trademarked True Non-Contact mode design preserves tip sharpness for prolonged high resolution imaging and much longer tip life. Typical tip life runs 1,000~2,000 images per tip. The NX-PTR, which is available, offers powerful nanoscale automated measurements, powerfully improved capability in throughput, tip life and operation robustness and increased throughput for HDD production manufacturing.