MicroSense Installed STT-MRAM Magnetic Metrology System

MicroSense, LLC announced installation of a suite of STT-MRAM magnetic metrology tools at a semiconductor manufacturer.

These metrology systems characterize the magnetic properties of multi-layer 300mm wafers or coupons used in the development and manufacturing of perpendicular and In-Plane STT-MRAM (Spin-Transfer-Torque Magneto-resistive Random Access Memory).

“Although we’ve received multiple individual orders for our various MRAM metrology systems from chip manufacturers and research institutes, we are pleased that a major customer ordered a full suite of our tools to use in their STT-MRAM program,” said Tom McNabb, president and COO, MicroSense. “This full suite includes our Polar Kerr system for 200mm or 300mm Perpendicular STT-MRAM wafers and our KerrMapper tool for 200mm or 300mm In-plane STT-MRAM wafers. Our EZ Vibrating Sample Magnetometer measures sample coupons from Perpendicular or In-Plane STT-MRAM wafers. We believe these are critical enabling metrology tools for our customers as STT-MRAM appears to be building momentum as a next generation, non-volatile, scalable memory.“

“Our magnetic measurement systems provide critical process control information, to improve yield on multi-layer magnetic stacks that are an essential component of STT-MRAM fabrication,” said Ferenc Vajda, Ph.D., director of magnetic metrology, MicroSense. “These metrology systems utilize our 30 years of proprietary technologies in system design, magnetic field control and complex algorithms that result in world leading performance. Our systems can measure wafers up to 300 mm and are applicable to both R&D and production needs. Systems are available in manual-loading or fully-automated configurations.“