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Undisclosed HDD Maker Adopts Jordan Valley JVX7300RF (XRR&XRF) Platform

For metrology of advanced magnetic heads

Jordan Valley Semiconductors Ltd, a supplier of X-ray based in-line metrology systems for the semiconductor and related industries, received a repeat order from an undisclosed HDD manufacturer who selected the new JVX7300RF metrology system for their advanced process control.

The JVX7300RF system provides in-line metrology capabilities and combines Jordan Valley’s convergent beam XRR and the vertical small spot XRF measurement channels on their latest generation tool platform. The tool provides product wafers metrology solutions for complex multilayer stacks, ultra-thin layers (<10Å) and small pads.

The JVX7300RF provides ROI and CoO for inline metrology of magnetic stacks used in latest generation of read-heads and allows non-destructive thickness and composition measurements at high throughputs prior to head assembly.

The customer noted that the JVX7300RF was ordered after evaluation of the combined XRR/XRF technology in multiple production sites last year.

Isaac Mazor, Jordan Valley’s CEO, commented: “This tool was selected ue to its substantial return of investment. HDD manufacturers set unique metrology challenges and requirements for advanced process control. The JVX7300RF is the successor of the production proven JVX6200iRF and provides improved productivity, new capabilities, improved ease-of-use, maintainability and more.

The JVX7300RF is a production worthy X-ray metrology tool combining XRR and XRF channels. The tool targets both semiconductor 20nm and below FEOL applications and advanced HDD manufacturing. The tool is configured for full fab automation and is SEMI S2/S8 and CE certified.

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